Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates
2010
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Title
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates
Author(s)
Vazquez-Mena, Oscar ; Sannomiya, Takumi ; Villanueva, Luis Guillermo ; Savu, Veronica ; Sidler, Katrin ; Voros, Janos ; Brugger, Juergen
Conference
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010
Date
2010
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URL
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Peer-reviewed publications
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Peer-reviewed publications
Work produced at EPFL
Published
Record creation date
2010-01-20