Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications
2009
Details
Title
Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications
Author(s)
Dimitrakis, P ; Mouti, Anas ; Bonafos, Caroline ; Schamm, Sylvie ; BenAssayag, Gerard ; Ioannou-Sougleridis, V ; Schmidt, B ; Becker, J ; Normand, Pascal
Published in
Microelectronic Engineering
Issue
86
Pages
1838-1841
Date
2009
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-11-09