Mechanically tuneable microoptical structure based on PDMS

A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlenses with uncoupled optical properties that can be mechanically actuated. This device was numerically simulated prior to its fabrication, to optimize its design and improve its behaviour. In addition, an optical characterization of the fabricated devices was carried out to provide a proof of concept of the presented devices and validate the proposed fabrication technology.


Published in:
Proceedings of the Eurosensors XXIII conference
Presented at:
XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.
Year:
2009
Keywords:
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Note: The status of this file is: EPFL only


 Record created 2009-11-06, last modified 2018-09-13

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