000142204 001__ 142204
000142204 005__ 20190421110043.0
000142204 0247_ $$2doi
000142204 02470 $$2ISI$$a000282923900019
000142204 0247_ $$a10.1016/j.proche.2009.07.140
000142204 037__ $$aCONF
000142204 245__ $$aMechanically tuneable microoptical structure based on PDMS
000142204 269__ $$a2009
000142204 260__ $$c2009
000142204 336__ $$aConference Papers
000142204 520__ $$aA PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlenses with uncoupled optical properties that can be mechanically actuated. This device was numerically simulated prior to its fabrication, to optimize its design and improve its behaviour. In addition, an optical characterization of the fabricated devices was carried out to provide a proof of concept of the presented devices and validate the proposed fabrication technology.
000142204 6531_ $$aMicrolenses
000142204 6531_ $$atuneable focus
000142204 6531_ $$aPDMS
000142204 700__ $$0245972$$g190686$$aCadarso, V. J.
000142204 700__ $$aLlobera, A.
000142204 700__ $$0240380$$g176631$$aVillanueva, G.
000142204 700__ $$aPlaza, J. A.
000142204 700__ $$g145781$$aBrugger, J.$$0240120
000142204 700__ $$aDominguez, C.
000142204 7112_ $$dSeptember 6-9, 2009.$$cLausanne, Switzerland$$aXXIII Eurosensors Conference
000142204 773__ $$tProceedings of the Eurosensors XXIII conference$$q560-563
000142204 8564_ $$uhttps://infoscience.epfl.ch/record/142204/files/Cadarso%20EurosensorsXIII_fv.pdf$$zn/a$$s256696
000142204 909C0 $$xU12739$$0252546$$pNEMS
000142204 909C0 $$pLMIS1$$xU10321$$0252040
000142204 909CO $$qGLOBAL_SET$$pconf$$pSTI$$ooai:infoscience.tind.io:142204
000142204 917Z8 $$x176631
000142204 937__ $$aLMIS1-CONF-2009-029
000142204 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000142204 980__ $$aCONF