000142204 001__ 142204 000142204 005__ 20190421110043.0 000142204 02470 $$2ISI$$a000282923900019 000142204 0247_ $$2doi$$a10.1016/j.proche.2009.07.140 000142204 037__ $$aCONF 000142204 245__ $$aMechanically tuneable microoptical structure based on PDMS 000142204 269__ $$a2009 000142204 260__ $$c2009 000142204 336__ $$aConference Papers 000142204 520__ $$aA PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlenses with uncoupled optical properties that can be mechanically actuated. This device was numerically simulated prior to its fabrication, to optimize its design and improve its behaviour. In addition, an optical characterization of the fabricated devices was carried out to provide a proof of concept of the presented devices and validate the proposed fabrication technology. 000142204 6531_ $$aMicrolenses 000142204 6531_ $$atuneable focus 000142204 6531_ $$aPDMS 000142204 700__ $$0245972$$aCadarso, V. J.$$g190686 000142204 700__ $$aLlobera, A. 000142204 700__ $$0240380$$aVillanueva, G.$$g176631 000142204 700__ $$aPlaza, J. A. 000142204 700__ $$0240120$$aBrugger, J.$$g145781 000142204 700__ $$aDominguez, C. 000142204 7112_ $$aXXIII Eurosensors Conference$$cLausanne, Switzerland$$dSeptember 6-9, 2009. 000142204 773__ $$q560-563$$tProceedings of the Eurosensors XXIII conference 000142204 8564_ $$s256696$$uhttps://infoscience.epfl.ch/record/142204/files/Cadarso%20EurosensorsXIII_fv.pdf$$zn/a 000142204 909C0 $$0252546$$pNEMS$$xU12739 000142204 909C0 $$0252040$$pLMIS1$$xU10321 000142204 909CO $$ooai:infoscience.tind.io:142204$$pconf$$pSTI$$qGLOBAL_SET 000142204 917Z8 $$x176631 000142204 937__ $$aLMIS1-CONF-2009-029 000142204 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED 000142204 980__ $$aCONF