000142204 001__ 142204
000142204 005__ 20180318102732.0
000142204 0247_ $$2doi$$a10.1016/j.sna.2010.02.025
000142204 02470 $$2ISI$$a000282923900019
000142204 037__ $$aCONF
000142204 245__ $$aMechanically tuneable microoptical structure based on PDMS
000142204 269__ $$a2009
000142204 260__ $$c2009
000142204 336__ $$aConference Papers
000142204 520__ $$aA PDMS based tuneable microoptical system fabricated  merging deep reactive ion etching, SU-8 and soft  lithography, with a low-cost (mass-production), simple and  highly repetitive technology, is presented. This system  consists on a structure of two microlenses with uncoupled  optical properties that can be mechanically actuated. This  device was numerically simulated prior to its fabrication,  to optimize its design and improve its behaviour. In  addition, an optical characterization of the fabricated  devices was carried out to provide a proof of concept of  the presented devices and validate the proposed fabrication  technology.
000142204 6531_ $$aMicrolenses
000142204 6531_ $$atuneable focus
000142204 6531_ $$aPDMS
000142204 700__ $$0245972$$aCadarso, V. J.$$g190686
000142204 700__ $$aLlobera, A.
000142204 700__ $$0240380$$aVillanueva, G.$$g176631
000142204 700__ $$aPlaza, J. A.
000142204 700__ $$0240120$$aBrugger, J.$$g145781
000142204 700__ $$aDominguez, C.
000142204 7112_ $$aXXIII Eurosensors Conference$$cLausanne, Switzerland$$dSeptember 6-9, 2009.
000142204 773__ $$tProceedings of the Eurosensors XXIII conference
000142204 8564_ $$s256696$$uhttps://infoscience.epfl.ch/record/142204/files/Cadarso%20EurosensorsXIII_fv.pdf$$zn/a
000142204 909CO $$ooai:infoscience.tind.io:142204$$pconf$$pSTI
000142204 909C0 $$0252546$$pNEMS$$xU12739
000142204 909C0 $$0252040$$pLMIS1$$xU10321
000142204 917Z8 $$x176631
000142204 937__ $$aLMIS1-CONF-2009-029
000142204 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000142204 980__ $$aCONF