Absolute and high precision 3 degrees of freedom position sensor

We present a compact 3 degrees of freedom (dof) (X-Y-θz) absolute position sensor offering a sub-micrometric resolution. The travelling range is 15x15mm2 (translations) and ±180° (rotation), with an absolute precision better than 10μm over the whole travelling range and of less than 1μm of resolution (0.02° for rotation). The position acquisition frequency is 10Hz. The sensor is composed of a CCD camera chip, a silicon target with a pattern of holes constituting a digital code and a luminescent polymer sheet to light the holes. The reading of the pattern code is performed by image processing.


Published in:
Proceedings Of The Eurosensors Xxiii Conference, 1, 1359-1362
Presented at:
Eurosensor 2009, Lausanne, September 6-9, 2009
Year:
2009
Publisher:
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa
Keywords:
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 Record created 2009-10-20, last modified 2018-02-13

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