Modeling of atomic-scale processes during silicon oxidation: charge state of the O2 molecule
2007
Details
Title
Modeling of atomic-scale processes during silicon oxidation: charge state of the O2 molecule
Author(s)
Alkauskas, A. ; Pasquarello, A.
Published in
Materials Research Society Symposium Proceedings
Volume
996E
Pages
0996-H01-01
Conference
Characterization of oxide/semiconductor interfaces for CMOS technologies, San Francisco, California, April 9-13, 2007
Date
2007
Laboratories
CSEA
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > CSEA - Chair of Atomic Scale Simulation
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-10-14