Interpretation of N 1s core-level shifts at nitrided Si(001)-SiO2 interfaces: A first-principles study
2001
Details
Title
Interpretation of N 1s core-level shifts at nitrided Si(001)-SiO2 interfaces: A first-principles study
Author(s)
Rignanese, G.M. ; Pasquarello, A.
Published in
Materials Research Society Workshop Series
Issue
24
Conference
International workshop on device technology : Alternatives to SiO2 as Gate Dielectric for Future Si-Based Microelectronics, Porto Alegre, Brazil, September 3-5, 2001
Date
2001
Laboratories
CSEA
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > CSEA - Chair of Atomic Scale Simulation
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-10-14