SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

We have designed and fabricated a low-range (ca. 100 mN) thick-film piezoresistive force sensor with a cantilever beam fabricated in LTCC (Low Temperature Co-fired Ceramic). The beam was soldered onto a standard thick-film 25.4 x 12.7 mm signal conditioning base [1]. Switching from a classical Al2O3-based thick-film beam to LTCC allows design of a 3D structured beam with increased sensitivity of the piezoresistive bridge, yet largely conserved strength and stiffness. Another advantage of LTCC compared to alumina is a lower Young’s modulus (approx. 3 times lower), more suitable for the measurement of small loads.


Published in:
procedia Chemistry - Proceedings of Eurosensors XXIII, 1, 1, 1471-1474
Presented at:
Eurosensors XXIII, Lausanne, 7-9.9.2009
Year:
2009
Publisher:
Amsterdam, Elsevier
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2009-09-11, last modified 2018-01-28

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