Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
2002
Details
Title
Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
Author(s)
Hoffmann, Patrik ; Utke, Ivo ; Cicoira, Fabio
Published in
10th Int. Symp. Nanostructures: Physics and Technology
Pages
5-11
Date
2002
Publisher
IOFFE Institute
Keywords
Note
Invited
Other identifier(s)
View record in Web of Science
Laboratories
LOA