Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
Hoffmann, Patrik; Utke, Ivo; Cicoira, Fabio
2002

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Title Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
Author(s) Hoffmann, Patrik ; Utke, Ivo ; Cicoira, Fabio
Published in 10th Int. Symp. Nanostructures: Physics and Technology
Pages 5-11
Date 2002
Publisher IOFFE Institute
Keywords
Note Invited
Other identifier(s) View record in Web of Science
Laboratories LOA
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
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