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Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition

Hoffmann, Patrik ; Utke, Ivo ; Cicoira, Fabio

Published in:
10th Int. Symp. Nanostructures: Physics and Technology, 5-11
Year:
2002
Publisher:
IOFFE Institute
Keywords:
[NRG]
Note:
Invited
Other identifiers:
View record in Web of Science
Laboratories:
LOA

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published



 Record created 2009-07-20, last modified 2018-03-17


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