Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition


Published in:
10th Int. Symp. Nanostructures: Physics and Technology, 5-11
Year:
2002
Publisher:
IOFFE Institute
Keywords:
Note:
Invited
Laboratories:




 Record created 2009-07-20, last modified 2018-03-17


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