Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
2002
Details
Title
Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
Author(s)
Hoffmann, Patrik ; Utke, Ivo ; Cicoira, Fabio
Published in
10th International Symposium on Nanostructures: Physics and Technology
Pages
5-11
Date
2002
Publisher
IOFFE Institute
Keywords
Note
Invited
Other identifier(s)
View record in Web of Science
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-07-20