Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition

• Published in: 10th Int. Symp. Nanostructures: Physics and Technology, p. 5-11
• IOFFE Institute, 2002

Keywords: [NRG]

Note:

Invited

Reference

• LOA-CONF-2002-030
• View record in Web of Science

Record created on 2009-07-20, modified on 2017-05-10