Coated, light-transmitting or reflecting substrate, used as optical component or window, e.g. lens, mirror or windscreen, has (per)fluoroalkylsilane coating produced by plasma etching, hydration, drying and gas phase deposition
2002
Abstract
A method for the gas phase deposition of partially fluorinated or perfluorinated alkyl silanes onto a substrate in a reaction chamber includes cleaning the substrate, hydrating the substrate with steam, drying the substrate and silanization of the substrate by deposition of the alkyl silane from the gas phase. The cleaning of the substrate is a plasma etching process and the hydration occurs directly after the plasma etching.
Details
Title
Coated, light-transmitting or reflecting substrate, used as optical component or window, e.g. lens, mirror or windscreen, has (per)fluoroalkylsilane coating produced by plasma etching, hydration, drying and gas phase deposition
Author(s)
Hoffmann, Patrik ; Kulig, Gerit ; Barbieri, Laura
Date
2002
Publisher
SWISSOPTIC AG (SWIS-Non-standard) ECOLE POLYTECHNIQUE FEDERALE LAUSANNE (ECOL-Non-standard)
Keywords
Note
Alternative title(s) :
(de) Gasphasenabscheidung von perfluorierten alkylsilanen
(fr) Depot en phase gazeuse d'alkylsilanes perfluores
(en) Gas phase deposition of perfluorinated alkyl silanes
Other identifier(s)
EPO Family ID: 32049440
Patent number(s)
US2005247120 (A1)
EP1554058 (A1)
AU2003282034 (A1)
WO2004037446 (A1)
DE10248775 (A1)
EP1554058 (A1)
AU2003282034 (A1)
WO2004037446 (A1)
DE10248775 (A1)
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Scientific production and competences > Non-academic units > TTO - Technology Transfer Office
Work produced at EPFL
Patents
Scientific production and competences > Non-academic units > TTO - Technology Transfer Office
Work produced at EPFL
Patents
Record creation date
2009-07-20