High uniformity deposition with chemical beams in high vacuum
2002
Details
Title
High uniformity deposition with chemical beams in high vacuum
Author(s)
Benvenuti, G. ; Halary-Wagner, E. ; Brioude, A. ; Hoffmann, P.
Published in
EMRS
Date
2002
Keywords
Other identifier(s)
DAR: 3687
View record in Web of Science
View record in Web of Science
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-07-20