Static vapor pressure measurements of low volatile precursors for Molecular Vapor Deposition below ambient temperature
2001
Details
Title
Static vapor pressure measurements of low volatile precursors for Molecular Vapor Deposition below ambient temperature
Author(s)
Ohta, T. ; Cicoira, F. ; Doppelt, P. ; Beitone, L. ; Hoffmann, P.
Published in
Chemical Vapor Deposition
Volume
7
Issue
1
Pages
33-37
Date
2001
Keywords
Note
\\Atlantis\MAD\MAD public\Publi Present Conferences\Publications\printed papers\2001 : NRG Ohta 2001 115
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Work produced at EPFL
Journal Articles
Published
Work produced at EPFL
Journal Articles
Published
Record creation date
2009-07-20