Selective area deposition of titanium dioxide thin films by light induced chemical vapour deposition
2001
Details
Title
Selective area deposition of titanium dioxide thin films by light induced chemical vapour deposition
Author(s)
Halary-Wagner, E. ; Lambelet, P. ; Benvenuti, G. ; Hoffmann, P.
Published in
Journal de Physique IV
Volume
11
Pages
Pr3-825-832
Conference
EUROCVD 13 Thirteenth European Conference on Chemical Vapor Deposition
Date
2001
Publisher
EDP Sciences
Keywords
Additional link
URL
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-07-20