Electrochemical Micromachining of Titanium through a Laser Patterned Oxide Film

Selective dissolution of titanium through a laser patterned oxide film has been achieved in a 3M sulfuric acid-methanol electrolyte. The 250 nm thick oxide film was formed anodically on a flat titanium surface in 0.5 M sulfuric acid. The patterning of the film was obtained by local irradiation using a long pulse XeCl eximer laser. Electrochemical dissolution at irradiated lines on the oxide film yielded well-defined grooves comparable to those resulting from electrochemical micromachining through a photoresist mask. The described process permits electrochemical micromachining of titanium without photoresist and thus can lead to new applications of this technique.


Published in:
Electrochem. Sol. State Lett., 4, 5, C31-C34
Year:
2001
Keywords:
Other identifiers:
Laboratories:




 Record created 2009-07-20, last modified 2018-09-13

External link:
Download fulltext
URL
Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)