Focused electron beam induced deposition of gold

Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters is formed. In this work, we present a new and easy approach to obtain high purity gold lines: the use of inorganic PF3AuCl as a precursor. Electrical resistivities as low as 22 µOhms cm at 295 K (ten times the bulk Au value) were obtained. This is to our knowledge the best value for focused electron beam deposition obtained from the vapor phase so far. No special care was taken to prevent hydrocarbon contamination. The deposited nanostructure consists of gold grains varying in size and percolation with beam parameters.


Published in:
J. Vac. Sci. Technol. B, 18, 3168-3171
Year:
2000
Publisher:
American Vacuum Society
ISSN:
1071-1023
Keywords:
Note:
\\Atlantis\MAD\MAD public\Publi Present Conferences\Publications\printed papers\2000 : NRG Utke JVST 2000 53
Laboratories:




 Record created 2009-07-20, last modified 2018-03-18

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