000139847 001__ 139847
000139847 005__ 20180318102733.0
000139847 0247_ $$2doi$$a10.1016/S0167-9317(00)00311-7
000139847 037__ $$aARTICLE
000139847 245__ $$aElectron beam induced deposition of metallic tips and wires for microelectronics applications
000139847 269__ $$a2000
000139847 260__ $$c2000
000139847 336__ $$aJournal Articles
000139847 6531_ $$a[NRG]
000139847 700__ $$0241493$$aUtke, I.$$g113509
000139847 700__ $$0240081$$aDwir, B.$$g105040
000139847 700__ $$0241420$$aLeifer, K.$$g102335
000139847 700__ $$aCicoira, F.
000139847 700__ $$aDoppelt, P.
000139847 700__ $$0241019$$aHoffmann, P.$$g113150
000139847 700__ $$0240239$$aKapon, E.$$g105530
000139847 773__ $$j53$$k1-4$$q261-264$$tMicroelec. Engin.
000139847 8564_ $$u\\Atlantis\MAD\MAD public\Publi Present Conferences\Publications\printed papers\2000 : NRG Utke ME 2000 54.pdf$$zURL
000139847 909CO $$ooai:infoscience.tind.io:139847$$pSB$$pSTI$$particle
000139847 909C0 $$0252008$$pLOA$$xU10346
000139847 909C0 $$0252035$$pLPN$$xU10158
000139847 937__ $$aLOA-ARTICLE-2000-019
000139847 937__ $$aLPN-ARTICLE-2000-029
000139847 973__ $$aEPFL$$sPUBLISHED
000139847 980__ $$aARTICLE