Electron beam induced deposition of metallic tips and wires for microelectronics applications
1999
Details
Title
Electron beam induced deposition of metallic tips and wires for microelectronics applications
Author(s)
Utke, I. ; Dwir, B. ; Leifer, K. ; Cicoira, F. ; Doppelt, P. ; Hoffmann, P. ; Kapon, E.
Published in
Micro- and Nano Engineering MNE99
Date
1999
Keywords
Note
JUN
MICROELECTRON ENG
MICROELECTRON ENG
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-07-20