Electron beam induced deposition of metallic tips and wires for microelectronics applications


Published in:
Micro- and Nano Engineering MNE99
Year:
1999
Keywords:
Note:
JUN
MICROELECTRON ENG
Laboratories:




 Record created 2009-07-20, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)