Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution
2006
Details
Title
Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution
Author(s)
Depeursinge, C. D. ; Marian, A. M. ; Montfort, F. ; Colomb, T. ; Charriere, F. ; Kuhn, J.
Published in
Fringe 2005
Pages
308-314
Conference
The 5th International Workshop on Automatic Processing of Finge Patterns, Stuttgart, November 28-2, 2005
Date
2006
Publisher
Springer-Verlag, Berlin
ISBN
3-540-26037-4
Other identifier(s)
View record in Web of Science
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-07-20