Digital holography for quantitative phase-contrast imaging
We present a new application of digital holography for phase- contrast imaging and optical metrology. This holographic imaging technique uses a CCD camera for recording of a digital Fresnel off-axis hologram and a numerical method for hologram reconstruction. The method simultaneously provides an amplitude- contrast image and a quantitative phase-contrast image. An application to surface profilometry is presented and shows excellent agreement with contact- stylus probe measurements. (C) 1999 Optical Society of America.
Keywords: [MVD] ; Detectors : CCD, charge-coupled device ; Holography : Holography ; Instrumentation, measurement, and metrology : Metrology ; Instrumentation, measurement, and metrology : Phase measurement ; Machine vision : Three-dimensional sensing
Record created on 2009-07-20, modified on 2016-08-08