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Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films
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Infrared laser-based monitoring of the silane diss[...]
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Bartlome, R
et al
main
file(s):
IR laser-based monitoring of SiH4 dissociation during deposition of Si thin films
version 1
IR laser-based monitoring of SiH4 dissociation during deposition of Si thin films.pdf
[236.44 KB]
27 Jan 2018, 13:12
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