Investigation of Strain Profile Optimization in Gate-All-Around Suspended Silicon Nanowire FET


Published in:
The 38th European Solid-State Device Research Conference (IEEE ESSDERC 2008)
Presented at:
IEEE ESSDERC 2008, Edinburgh, Scotland, Sep. 15-19, 2008
Year:
2008
Keywords:
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 Record created 2009-07-15, last modified 2018-03-17

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