Fabrication of microfluidic mixers with varying topography in glass using the powder blasting process
The powder-blasting method is used to fabricate structures with a three-dimensional topography in glass using elastomeric masks. The relation between the mask opening width and the erosion depth is exploited to fabricate microstructures with varying depth in a single micropatterning step. As an application, planar three-dimensional micro-mixers were fabricated, which consist of a repeating convergent microfluidic nozzle structure. Three different designs of the micro-mixers were considered. The mixing of co-flowing laminar streams results from the generation of multiple vortices at the exit of the different convergent nozzles.