Fabrication of microfluidic mixers with varying topography in glass using the powder blasting process

The powder-blasting method is used to fabricate structures with a three-dimensional topography in glass using elastomeric masks. The relation between the mask opening width and the erosion depth is exploited to fabricate microstructures with varying depth in a single micropatterning step. As an application, planar three-dimensional micro-mixers were fabricated, which consist of a repeating convergent microfluidic nozzle structure. Three different designs of the micro-mixers were considered. The mixing of co-flowing laminar streams results from the generation of multiple vortices at the exit of the different convergent nozzles.


Published in:
Journal of Micromechanics and Microengineering, 19, 8, 085024
Year:
2009
Keywords:
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 Record created 2009-07-13, last modified 2018-03-17


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