Piezoelectric Films for Innovations in the Field of MEMS and Biosensors


Editor(s):
Heywang, W.
Lubitz, K.
Wersing, W.
Published in:
Piezoelectricity: Evolution and Future of a Technology, 351-376
Year:
2008
Publisher:
Berlin, Springer
Laboratories:




 Record created 2009-06-25, last modified 2018-03-17


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