Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS
2008
Details
Title
Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS
Author(s)
Martin, Cristina ; Ingrosso, Chiara ; Llobera, Andreu ; Perez-Murano, Francesc ; Sangregorio, Claudio ; Brugger, Juergen ; Striccoli, Marinella ; Agostiano, Angela ; Curri, M. Lucia
Published in
34th International Conference on Micro and Nano Engineering (MNE'2008)
Conference
34th International Conference on Micro and Nano Engineering (MNE'2008), Athens, Greece, September 15-18, 2008
Date
2008
Additional link
URL
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-06-03