Quasi-dry Release for Micro Electro-Mechanical Systems
2005
Details
Title
Quasi-dry Release for Micro Electro-Mechanical Systems
Author(s)
Zickar, M. ; Noell, W. ; Overstolz, T. ; Spörl, C. ; de Rooij, N. F.
Published in
10th International Commercialization of Micro and Nano Systems Conference (COMS 2005)
Pages
611-616
Date
2005
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12