NEMS Need MEMS
2006
Details
Title
NEMS Need MEMS
Author(s)
Zickar, M. ; Noell, W. ; Märki, I. ; Herzig, H. P. ; Gullo, M. ; Staufer, U. ; Imer, R. ; Guenat, O. ; Koudelka-Hep, M. ; de Rooij, N. F.
Published in
1st IEEE Int. Conf. on Nano/Micro Engineering and Molecular Systems
Volume
1
Pages
174
Date
2006
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12