Effect of Air Damping on the Dynamics of Nonuniform Deformations of Microstructures
1997
Details
Title
Effect of Air Damping on the Dynamics of Nonuniform Deformations of Microstructures
Author(s)
Yang, Y.-J. ; Grétillat, M.-A. ; Senturia, S. D.
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
2
Pages
1093-1096
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12