Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy
2007
Files
Details
Title
Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy
Author(s)
Waldis, S. ; Clerc, P.-A. ; Zamkostian, F. ; Zickar, M. ; Noell, W. ; de Rooij, N. F.
Published in
MOEMS and Miniaturized Systems VI
Series
SPIE Proceedings, 6466
Pages
646603
Conference
MOEMS-MEMS 2007 Micro and Nanofabrication, San Jose, California, United States, 20-25 January 2007
Date
2007
Note
waldis_pw07_6466-2.pdf
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12