High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
2006
Details
Title
High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
Author(s)
Waldis, S. ; Clerc, P.-A. ; Noell, W. ; Zickar, M. ; de Rooij, N. F. ; Zamkostian, F.
Published in
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
Pages
48-49
Date
2006
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12