Details
Title
Surface Micromachined Electrostatic Actuators.
Author(s)
JAECKLIN, Victor
Advisor(s)
Date
1994
Publisher
Université de Neuchâtel
Note
Jury: R. Dändliker (IMT-UniNE), X.Ph Renaud (EPFL), P. Vettiger (IBM ZH).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12