Characterization and Modelling of Silicon Piezoresistive Accelerometers Fabricated by a Bipolar-Compatible Process
1991
Details
Title
Characterization and Modelling of Silicon Piezoresistive Accelerometers Fabricated by a Bipolar-Compatible Process
Author(s)
Tschan, T. ; de Rooij, N. F. ; Bezinge, A. ; Ansermet, S. ; Berthoud, J.
Published in
Sensors and Actuators A
Volume
25-27
Pages
605-609
Date
1991
Note
58
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12