Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers : Predictions and Limitations Compared to Experiments


Published in:
Sensors and Materials, 189-203
Year:
1992
Laboratories:




 Record created 2009-05-12, last modified 2018-09-13


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)