Infoscience

Conference paper

Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers : Predictions and Limitations Compared to Experiments

Tschan, T.; de Rooij, N. F.; Bezinge, A.
  • Published in: Sensors and Materials, p. 189-203
  • Publication date: 1992

    Reference

    • SAMLAB-CONF-1992-018

    Record created on 2009-05-12, modified on 2016-08-08

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