Home > Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers : Predictions and Limitations Compared to Experiments
 

Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers : Predictions and Limitations Compared to Experiments

Tschan, T. ; de Rooij, N. F. ; Bezinge, A.

Published in:
Sensors and Materials, 189-203
Year:
1992
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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