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> Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers : Predictions and Limitations Compared to Experiments
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Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers : Predictions and Limitations Compared to Experiments
Tschan, T.
;
de Rooij, N. F.
;
Bezinge, A.
Published in:
Sensors and Materials, 189-203
Year:
1992
Laboratories:
SAMLAB
Record appears in:
Scientific production and competences
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STI - School of Engineering
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SAMLAB - Sensors, Actuators and Microsystems Laboratory
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Record created 2009-05-12, last modified 2018-03-17
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