Details
Title
Oil-Damped Piezoresistive Silicon Accelerometers
Author(s)
Tschan, T. ; de Rooij, N. F. ; Bezinge, A.
Published in
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Pages
112-114
Date
1991
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12