000138362 001__ 138362
000138362 005__ 20180913055304.0
000138362 037__ $$aCONF
000138362 245__ $$aDry Etching Techniques for Silicon Micromachining
000138362 260__ $$c1990
000138362 269__ $$a1990
000138362 336__ $$aConference Papers
000138362 700__ $$aTschan, T.
000138362 700__ $$aLinder, C.
000138362 700__ $$0243301$$ade Rooij, N. F.$$g104887
000138362 773__ $$q253-260$$tMME'90 - Micromechanics Europe
000138362 909C0 $$0252173$$pSAMLAB$$xU10329
000138362 909CO $$ooai:infoscience.tind.io:138362$$pconf
000138362 937__ $$aSAMLAB-CONF-1990-013
000138362 973__ $$aOTHER$$rNON-REVIEWED$$sPUBLISHED
000138362 980__ $$aCONF