Details
Title
Dry Etching Techniques for Silicon Micromachining
Author(s)
Tschan, T. ; Linder, C. ; de Rooij, N. F.
Published in
MME'90 - Micromechanics Europe
Pages
253-260
Date
1990
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12