Title
Tunable Optical Microsystems featuring Vertical Electrostatic Comb Drives
Date
2007
Publisher
Université de Neuchâtel
Note
Jury: W. Noell (IMT-UniNE), H. Shea (EPFL-LMTS), H.-P. Herzig (IMT-UniNE), R. Stanley (CSEM)
Record creation date
2009-05-12