Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004
Details
Title
Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
Author(s)
Thiery, L. ; Briand, D. ; Odaymat, A. ; de Rooij, N. F.
Published in
10th International Workshop on Thermal Investigation of ICS and Systems
Pages
23-28
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12