Details
Title
Photopatterning at thick photoresist layers for MEMS applications.
Author(s)
ROTH, Sylvain
Advisor(s)
Date
2000
Publisher
Université de Neuchâtel
Note
Jury: M. Koudelka-Hep (IMT–Uni-NE), J. Bergqvist (CSEM).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12