Local Oxidation of Titanium Using a Dynamic Mode Operated Tuning Fork Probe with Microfabricated Silicon Cantilever
2005
Details
Title
Local Oxidation of Titanium Using a Dynamic Mode Operated Tuning Fork Probe with Microfabricated Silicon Cantilever
Author(s)
Suter, K. ; Akiyama, T. ; de Rooij, N. F. ; Staufer, U.
Published in
13th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques STM2005
Date
2005
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12