Optical MEMs based on Silicon-on-Insulator (SOI) for Monlithic Optical Microoptics
2002
Details
Title
Optical MEMs based on Silicon-on-Insulator (SOI) for Monlithic Optical Microoptics
Author(s)
Sun, W. ; Noell, W. ; de Rooij, N. F. ; Herzig, H. P. ; Manzardo, O. ; Dändliker, R.
Published in
LEOS Annual Meeting 2002
Date
2002
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12