Details
Title
Microcolumn Based Low Energy E-Beam Writing
Author(s)
Stebler, C. ; Despont, M. ; Staufer, U.
Published in
Microelectronic Engineering
Volume
30
Pages
45-48
Date
1996
Note
150
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12