Sample preparation by means of electron beam lithography
2004
Details
Title
Sample preparation by means of electron beam lithography
Author(s)
Staufer, U. ; Kunzi, P.-A. ; Gautsch, S. ; Aeschimann, L. ; Gullo, M. ; de Rooij, N. F.
Published in
4ème Colloque Franco-Suisse
Pages
15
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12