000138305 001__ 138305
000138305 005__ 20180913055303.0
000138305 037__ $$aCONF
000138305 245__ $$aSample preparation by means of electron beam lithography
000138305 260__ $$c2004
000138305 269__ $$a2004
000138305 336__ $$aConference Papers
000138305 700__ $$aStaufer, U.
000138305 700__ $$aKunzi, P.-A.
000138305 700__ $$0243290$$g190049$$aGautsch, S.
000138305 700__ $$aAeschimann, L.
000138305 700__ $$aGullo, M.
000138305 700__ $$ade Rooij, N. F.$$g104887$$0243301
000138305 773__ $$t4ème Colloque Franco-Suisse$$q15
000138305 909C0 $$0252173$$pSAMLAB$$xU10329
000138305 909CO $$pconf$$ooai:infoscience.tind.io:138305
000138305 937__ $$aSAMLAB-CONF-2004-070
000138305 973__ $$rNON-REVIEWED$$sPUBLISHED$$aOTHER
000138305 980__ $$aCONF