Sample preparation by means of electron beam lithography
Staufer, U.; Kunzi, P.-A.; Gautsch, S.; Aeschimann, L.; Gullo, M.; de Rooij, N. F.
2004

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Title Sample preparation by means of electron beam lithography
Author(s) Staufer, U. ; Kunzi, P.-A. ; Gautsch, S. ; Aeschimann, L. ; Gullo, M. ; de Rooij, N. F.
Published in 4ème Colloque Franco-Suisse
Pages 15
Date 2004
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
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