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Sample preparation by means of electron beam lithography

Staufer, U. ; Kunzi, P.-A. ; Gautsch, S. ; Aeschimann, L.[...]

Published in:
4ème Colloque Franco-Suisse, 15
Year:
2004
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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