Infoscience

Conference paper

Sample preparation by means of electron beam lithography

Staufer, U.; Kunzi, P.-A.; Gautsch, S.; Aeschimann, L.; Gullo, M.; de Rooij, N. F.
  • Published in: 4ème Colloque Franco-Suisse, p. 15
  • Publication date: 2004

    Reference

    • SAMLAB-CONF-2004-070

    Record created on 2009-05-12, modified on 2016-08-08

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