Details
Title
Microfabrication of tools for nanotechnology
Author(s)
Staufer, U.
Published in
Nanotec Conference
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12