The Potential Dependence of Silicon Anisotropic Etching in KOH at 60ÝC
1987
Details
Title
The Potential Dependence of Silicon Anisotropic Etching in KOH at 60ÝC
Author(s)
Smith, R. ; Kloeck, B. ; de Rooij, N. F. ; Collins, S. D.
Published in
Electroanalytical Chemistry
Volume
238
Pages
103
Date
1987
Note
15
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12