Details
Title
Design for Reliability of Drift-Dree MEMS Micromirrors
Author(s)
Shea, H. R.
Published in
Optical MEMS 2004
Volume
1
Pages
168-169
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12