Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy
2001
Details
Title
Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy
Author(s)
Schürmann, G. ; Noell, W. ; Staufer, U. ; de Rooij, N. F. ; Eckert, R. ; Freyland, J. M. ; Heinzelmann, H.
Published in
Applied Optics
Volume
40
Issue
28
Pages
5040-5045
Date
2001
Note
255
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12